Problem epi2 SNF 2010-08-17 02:29:47: LLA Door cannot be closed

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Tue Aug 17 02:29:48 PDT 2010

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Would not "Close" or "Load/Unload"
Had to manually close it and create wafers

Previous message: Comment epi2 SNF 2010-08-14 22:15:48: Offset of Dop2
Next message: Comment epi2 SNF 2010-08-30 06:28:14: pumped out AsH3 and PH3 lines
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