Shutdown epi2 SNF 2010-08-30 15:26:08: Vendor testing

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Aug 31 09:33:57 PDT 2010


Vendor testing has been completed. Ran Ge-etch coat with no problems.
The system now has a new mixed dopant MFC, throttle valve and light pen.




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