From maurice at snf.stanford.edu Wed Dec 1 09:50:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Dec 2010 09:50:53 -0800 Subject: Shutdown epi2 SNF 2010-12-01 09:50:53: 3 wafers in process chamber Message-ID: chamber needs to be opened, wafers removed and chamber inspected From tberg at snf.stanford.edu Thu Dec 2 09:47:49 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 2 Dec 2010 09:47:49 -0800 Subject: Comment epi2 SNF 2010-12-02 09:47:49: Epi update Message-ID: Vented Chamber, removed broken/lost wafers, Removed ruined suceptor. re assembling. From tberg at snf.stanford.edu Fri Dec 3 14:12:08 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 3 Dec 2010 14:12:08 -0800 Subject: Comment epi2 SNF 2010-12-03 14:12:08: System back together Message-ID: System back together. Ready for Maurice to qual From maurice at snf.stanford.edu Fri Dec 3 16:00:16 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 3 Dec 2010 16:00:16 -0800 Subject: Comment epi2 SNF 2010-12-03 16:00:15: Baking system/testing Monday Message-ID: The system will sit in active idle over the weekend. I will test on Monday. Yuel (narii) may try a Ge test on Sunday. From maurice at snf.stanford.edu Sun Dec 5 17:43:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 5 Dec 2010 17:43:53 -0800 Subject: Problem epi2 SNF 2010-11-30 18:46:22: 2 wafers missing Message-ID: Ted reports: Vented Chamber, removed broken/lost wafers, Removed ruined suceptor. re assembling. From maurice at snf.stanford.edu Sun Dec 5 17:44:14 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 5 Dec 2010 17:44:14 -0800 Subject: Shutdown epi2 SNF 2010-12-01 09:50:53: 3 wafers in process chamber Message-ID: Ted reports: Vented Chamber, removed broken/lost wafers, Removed ruined suceptor. re assembling. From maurice at snf.stanford.edu Sun Dec 5 17:45:26 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 5 Dec 2010 17:45:26 -0800 Subject: Shutdown epi2 SNF 2010-12-05 17:45:26: Testing after broken wafers removed Message-ID: Running test to check for haze. From narii at snf.stanford.edu Sun Dec 5 19:57:53 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 5 Dec 2010 19:57:53 -0800 Subject: Problem epi2 SNF 2010-12-05 19:57:52: Still hazy Message-ID: Seems like we need more time for the baking From maurice at snf.stanford.edu Sun Dec 5 20:30:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 5 Dec 2010 20:30:37 -0800 Subject: Shutdown epi2 SNF 2010-12-05 17:45:26: Testing after broken wafers removed Message-ID: System has been in Active idle (~700c) for two days. - I ran 5 Si deposition after Narii's Ge test. Each wafer looked better the the previous. The last wafer and a couple of light haze spots. - I am leaving the system in Active Idle overnight and yellow lighing the tool. - The susceptor has been changed... if you are running Ge or low temperature Si you should run a test before committing "good" wafers. Your process conditions may have changed. From maurice at snf.stanford.edu Sun Dec 5 20:35:48 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 5 Dec 2010 20:35:48 -0800 Subject: Comment epi2 SNF 2010-12-05 20:35:48: A few light haze spots on Hi temp Si Message-ID: System has been in Active idle (~700c) for two days. - I ran 5 Si deposition after Narii's Ge test. Each wafer looked better the the previous. The last wafer and a couple of light haze spots. - I am leaving the system in Active Idle overnight and yellow lighing the tool. If you are in the area and the system is not being used, run any of the etch programs. It will speed up the bake out process. - The susceptor has been changed... if you are running Ge or low temperature Si you should run a test before committing "good" wafers. Your process conditions may have changed. From zpatel at snf.stanford.edu Mon Dec 6 20:12:11 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Mon, 6 Dec 2010 20:12:11 -0800 Subject: Comment epi2 SNF 2010-12-06 20:12:10: Still hazy after 3 etch coat and 4 runs Message-ID: ran 3 etch coats before 4 depositions. depositions are hazy. The deposition pattern defines the susseptor and pin marks on the wafer From takashifuse at snf.stanford.edu Tue Dec 7 07:36:23 2010 From: takashifuse at snf.stanford.edu (takashifuse at snf.stanford.edu) Date: Tue, 7 Dec 2010 07:36:23 -0800 Subject: Problem epi2 SNF 2010-12-07 07:36:22: Pressure Deviation Error Message-ID: Previous user's recipe was stop by Pressure Deviation Error. I can't recover this. Could someone recover this by my reservation time? From maurice at snf.stanford.edu Tue Dec 7 09:51:29 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Dec 2010 09:51:29 -0800 Subject: Shutdown epi2 SNF 2010-12-07 09:51:28: Pressure deviations Message-ID: Homed/calibrated the PCV but still seeing the pressure deviations From tberg at snf.stanford.edu Tue Dec 7 12:21:27 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 7 Dec 2010 12:21:27 -0800 Subject: Shutdown epi2 SNF 2010-12-07 09:51:28: Pressure deviations Message-ID: Replaced Throttle valve again, homed and calibrated, ran Sigeetch no problem. User is on system now From tberg at snf.stanford.edu Tue Dec 7 12:22:15 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 7 Dec 2010 12:22:15 -0800 Subject: Problem epi2 SNF 2010-12-07 07:36:22: Pressure Deviation Error Message-ID: Replaced Throttle valve again, homed and calibrated, ran Sigeetch no problem. User is on system now From takashifuse at snf.stanford.edu Wed Dec 8 10:39:05 2010 From: takashifuse at snf.stanford.edu (takashifuse at snf.stanford.edu) Date: Wed, 8 Dec 2010 10:39:05 -0800 Subject: Problem epi2 SNF 2010-12-08 10:39:04: Pressure deviation Message-ID: During the "GE ETCHCOAT" program, Pressure deviation error happend again. I tried to reset the chamber 3 time but it was not recover and can't run the etchcoat program. It was always happen at step 6 or 7 on the ETCHCOAT program. From zpatel at snf.stanford.edu Thu Dec 9 10:50:46 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Thu, 9 Dec 2010 10:50:46 -0800 Subject: Shutdown epi2 SNF 2010-12-09 10:50:45: system over pressure Message-ID: System aborted when chamber pressure went to 800 T in the Ge etch run From ehe at snf.stanford.edu Thu Dec 9 15:31:21 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 9 Dec 2010 15:31:21 -0800 Subject: Comment epi2 SNF 2010-12-09 15:31:20: please don't shutdown on noncritical error Message-ID: From tberg at snf.stanford.edu Fri Dec 10 12:10:45 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 10 Dec 2010 12:10:45 -0800 Subject: Comment epi2 SNF 2010-12-10 12:10:44: Over Pressure Message-ID: Replaced Throttle valve, changed Pump. System still OP at ramp up step From maurice at snf.stanford.edu Fri Dec 10 14:24:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Dec 2010 14:24:47 -0800 Subject: Shutdown epi2 SNF 2010-12-09 10:50:45: system over pressure Message-ID: Replaced PCV. Places Chamber A pump. Modified GeEtch program (lift: lower changed to lift:normal in step 5). - We have run 4 Ge etches without pressure deviation warnings or chamber over pressure. We will continue to monitor system. - User should report any errors they see...even if they can recover from it. From cursive at snf.stanford.edu Sat Dec 11 13:44:24 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 11 Dec 2010 13:44:24 -0800 Subject: Problem epi2 SNF 2010-12-11 13:44:24: chamber A pressure setpoint deviation fault Message-ID: From cursive at snf.stanford.edu Sat Dec 11 13:49:25 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 11 Dec 2010 13:49:25 -0800 Subject: Shutdown epi2 SNF 2010-12-11 13:49:24: wafer stuck inside Message-ID: wafer stuck inside. can't move it out manually. From tberg at snf.stanford.edu Mon Dec 13 07:20:19 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Dec 2010 07:20:19 -0800 Subject: Shutdown epi2 SNF 2010-12-11 13:49:24: wafer stuck inside Message-ID: recovered vacuum, moved wafer to lla, ran geetchcoat no problem From tberg at snf.stanford.edu Mon Dec 13 07:20:29 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Dec 2010 07:20:29 -0800 Subject: Problem epi2 SNF 2010-12-11 13:44:24: chamber A pressure setpoint deviation fault Message-ID: recovered vacuum, moved wafer to lla, ran geetchcoat no problem From tberg at snf.stanford.edu Mon Dec 13 07:20:58 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Dec 2010 07:20:58 -0800 Subject: Comment epi2 SNF 2010-12-10 12:10:44: Over Pressure Message-ID: see maurice comments From tberg at snf.stanford.edu Mon Dec 13 07:21:09 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Dec 2010 07:21:09 -0800 Subject: Comment epi2 SNF 2010-12-09 15:31:20: please don't shutdown on noncritical error Message-ID: noted From zpatel at snf.stanford.edu Mon Dec 13 12:21:30 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Mon, 13 Dec 2010 12:21:30 -0800 Subject: Problem epi2 SNF 2010-12-13 12:21:29: Chamber F : no wafer on the blade Message-ID: From maurice at snf.stanford.edu Mon Dec 13 16:18:33 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Dec 2010 16:18:33 -0800 Subject: Problem epi2 SNF 2010-12-13 12:21:29: Chamber F : no wafer on the blade Message-ID: Zubin is running wafers that are not shiney. Elmer turned up the sensitivity of the detectors at Chamber F and Chamber A. System can now see Zubin's wafer. From maurice at snf.stanford.edu Mon Dec 13 16:19:46 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Dec 2010 16:19:46 -0800 Subject: Comment epi2 SNF 2010-12-06 20:12:10: Still hazy after 3 etch coat and 4 runs Message-ID: archive From maurice at snf.stanford.edu Mon Dec 13 16:19:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Dec 2010 16:19:53 -0800 Subject: Comment epi2 SNF 2010-12-05 20:35:48: A few light haze spots on Hi temp Si Message-ID: archive From maurice at snf.stanford.edu Mon Dec 13 16:20:00 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Dec 2010 16:20:00 -0800 Subject: Problem epi2 SNF 2010-12-05 19:57:52: Still hazy Message-ID: Archive From maurice at snf.stanford.edu Mon Dec 13 16:20:07 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Dec 2010 16:20:07 -0800 Subject: Comment epi2 SNF 2010-12-03 16:00:15: Baking system/testing Monday Message-ID: logged From maurice at snf.stanford.edu Mon Dec 13 16:20:14 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Dec 2010 16:20:14 -0800 Subject: Comment epi2 SNF 2010-12-03 14:12:08: System back together Message-ID: logged From maurice at snf.stanford.edu Mon Dec 13 16:20:30 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Dec 2010 16:20:30 -0800 Subject: Problem epi2 SNF 2010-11-27 17:22:15: dcs error Message-ID: logged From maurice at snf.stanford.edu Mon Dec 13 16:21:01 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Dec 2010 16:21:01 -0800 Subject: Problem epi2 SNF 2010-11-23 17:17:15: Particles again Message-ID: logged From zpatel at snf.stanford.edu Tue Dec 14 12:07:21 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Tue, 14 Dec 2010 12:07:21 -0800 Subject: Problem epi2 SNF 2010-12-14 12:07:21: Flat aligner contaminating the wafers Message-ID: Flat aligner is not able to handle 10 wafers It leaves the edge of the wafer with black sticking marks which makes the wafers stick to the cassettee causing more problems during wafer movement during the run. From zpatel at snf.stanford.edu Tue Dec 14 12:27:02 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Tue, 14 Dec 2010 12:27:02 -0800 Subject: Problem epi2 SNF 2010-12-14 12:27:02: Wafer Wand needs replacement Message-ID: From tberg at snf.stanford.edu Tue Dec 14 12:53:38 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Dec 2010 12:53:38 -0800 Subject: Problem epi2 SNF 2010-12-14 12:27:02: Wafer Wand needs replacement Message-ID: Replaced vacuum wand From tberg at snf.stanford.edu Tue Dec 14 12:55:00 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Dec 2010 12:55:00 -0800 Subject: Comment epi2 SNF 2010-12-14 12:55:00: Flatfinder is Messed up-DO NOT USE Message-ID: Flatfinder is Messed up-DO NOT USE-roller is goo will try and find a replacement or repair this one. ted From tberg at snf.stanford.edu Mon Dec 20 06:23:41 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Dec 2010 06:23:41 -0800 Subject: Shutdown epi2 SNF 2010-12-20 06:23:40: power off Message-ID: From tberg at snf.stanford.edu Wed Dec 22 10:30:56 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 22 Dec 2010 10:30:56 -0800 Subject: Shutdown epi2 SNF 2010-12-20 06:23:40: power off Message-ID: power back on , up to hot idle then back to inert From tberg at snf.stanford.edu Wed Dec 22 10:31:19 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 22 Dec 2010 10:31:19 -0800 Subject: Problem epi2 SNF 2010-12-22 10:31:19: no gases at this time Message-ID: