Comment epi2 SNF 2010-12-06 20:12:10: Still hazy after 3 etch coat and 4 runs

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Mon Dec 6 20:12:11 PST 2010


ran 3 etch coats before 4 depositions.
depositions are hazy.
The deposition pattern defines the susseptor and pin marks on the wafer




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