Problem epi2 SNF 2010-12-07 07:36:22: Pressure Deviation Error

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Tue Dec 7 07:36:23 PST 2010

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Previous user's recipe was stop by Pressure Deviation Error.
I can't recover this.
Could someone recover this by my reservation time?

Previous message: Comment epi2 SNF 2010-12-06 20:12:10: Still hazy after 3 etch coat and 4 runs
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