Problem epi2 SNF 2010-12-08 10:39:04: Pressure deviation

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Wed Dec 8 10:39:05 PST 2010


During the "GE ETCHCOAT" program, Pressure deviation error happend again.
I tried to reset the chamber 3 time but it was not recover and can't run the etchcoat program.
It was always happen at step 6 or 7 on the ETCHCOAT program.




More information about the epi2-pcs mailing list