Problem epi2 SNF 2010-12-08 10:39:04: Pressure deviation

takashifuse at takashifuse at
Wed Dec 8 10:39:05 PST 2010

During the "GE ETCHCOAT" program, Pressure deviation error happend again.
I tried to reset the chamber 3 time but it was not recover and can't run the etchcoat program.
It was always happen at step 6 or 7 on the ETCHCOAT program.

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