Shutdown epi2 SNF 2010-12-09 10:50:45: system over pressure

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Dec 10 14:24:47 PST 2010


Replaced PCV.  Places Chamber A pump.  Modified GeEtch program (lift: lower changed to lift:normal in step 5).
-
We have run 4 Ge etches without  pressure deviation warnings or chamber over pressure.  We will continue to monitor system.
-
User should report any errors they see...even if they can recover from it.




More information about the epi2-pcs mailing list