Shutdown epi2 SNF 2010-12-09 10:50:45: system over pressure

[maurice at snf.stanford.edu]

Replaced PCV.  Places Chamber A pump.  Modified GeEtch program (lift: lower changed to lift:normal in step 5).
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We have run 4 Ge etches without  pressure deviation warnings or chamber over pressure.  We will continue to monitor system.
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User should report any errors they see...even if they can recover from it.