Problem epi2 SNF 2010-12-14 12:07:21: Flat aligner contaminating the wafers

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Tue Dec 14 12:07:21 PST 2010


Flat aligner is not able to handle 10 wafers
It leaves the edge of the wafer with black sticking marks which makes the wafers stick to the cassettee causing more problems during wafer movement during the run.




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