December 2010 Archives by author

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Starting: Wed Dec 1 09:50:53 PST 2010
Ending: Wed Dec 22 10:31:19 PST 2010
Messages: 42

• Problem epi2 SNF 2010-12-11 13:44:24: chamber A pressure setpoint deviation fault   cursive at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-11 13:49:24: wafer stuck inside   cursive at snf.stanford.edu
• Comment epi2 SNF 2010-12-09 15:31:20: please don't shutdown on noncritical error   ehe at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-01 09:50:53: 3 wafers in process chamber   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-12-03 16:00:15: Baking system/testing Monday   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-11-30 18:46:22: 2 wafers missing   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-01 09:50:53: 3 wafers in process chamber   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-05 17:45:26: Testing after broken wafers removed   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-05 17:45:26: Testing after broken wafers removed   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-12-05 20:35:48: A few light haze spots on Hi temp Si   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-07 09:51:28: Pressure deviations   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-09 10:50:45: system over pressure   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-12-13 12:21:29: Chamber F : no wafer on the blade   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-12-06 20:12:10: Still hazy after 3 etch coat and 4 runs   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-12-05 20:35:48: A few light haze spots on Hi temp Si   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-12-05 19:57:52: Still hazy   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-12-03 16:00:15: Baking system/testing Monday   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-12-03 14:12:08: System back together   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-11-27 17:22:15: dcs error   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-11-23 17:17:15: Particles again   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-12-05 19:57:52: Still hazy   narii at snf.stanford.edu
• Problem epi2 SNF 2010-12-07 07:36:22: Pressure Deviation Error   takashifuse at snf.stanford.edu
• Problem epi2 SNF 2010-12-08 10:39:04: Pressure deviation   takashifuse at snf.stanford.edu
• Comment epi2 SNF 2010-12-02 09:47:49: Epi update   tberg at snf.stanford.edu
• Comment epi2 SNF 2010-12-03 14:12:08: System back together   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-07 09:51:28: Pressure deviations   tberg at snf.stanford.edu
• Problem epi2 SNF 2010-12-07 07:36:22: Pressure Deviation Error   tberg at snf.stanford.edu
• Comment epi2 SNF 2010-12-10 12:10:44: Over Pressure   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-11 13:49:24: wafer stuck inside   tberg at snf.stanford.edu
• Problem epi2 SNF 2010-12-11 13:44:24: chamber A pressure setpoint deviation fault   tberg at snf.stanford.edu
• Comment epi2 SNF 2010-12-10 12:10:44: Over Pressure   tberg at snf.stanford.edu
• Comment epi2 SNF 2010-12-09 15:31:20: please don't shutdown on noncritical error   tberg at snf.stanford.edu
• Problem epi2 SNF 2010-12-14 12:27:02: Wafer Wand needs replacement   tberg at snf.stanford.edu
• Comment epi2 SNF 2010-12-14 12:55:00: Flatfinder is Messed up-DO NOT USE   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-20 06:23:40: power off   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-20 06:23:40: power off   tberg at snf.stanford.edu
• Problem epi2 SNF 2010-12-22 10:31:19: no gases at this time   tberg at snf.stanford.edu
• Comment epi2 SNF 2010-12-06 20:12:10: Still hazy after 3 etch coat and 4 runs   zpatel at snf.stanford.edu
• Shutdown epi2 SNF 2010-12-09 10:50:45: system over pressure   zpatel at snf.stanford.edu
• Problem epi2 SNF 2010-12-13 12:21:29: Chamber F : no wafer on the blade   zpatel at snf.stanford.edu
• Problem epi2 SNF 2010-12-14 12:07:21: Flat aligner contaminating the wafers   zpatel at snf.stanford.edu
• Problem epi2 SNF 2010-12-14 12:27:02: Wafer Wand needs replacement   zpatel at snf.stanford.edu

Last message date: Wed Dec 22 10:31:19 PST 2010
Archived on: Sun Dec 23 08:52:57 PST 2012

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