Shutdown epi2 SNF 2010-02-12 23:45:45: HCL Flow Deviation Faults (Twice)

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Fri Feb 12 23:45:46 PST 2010


While running AAA MEGA ETCH, received faults of HCL flow deviation by 79% & 84% (tried running the recipe twice).  




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