Shutdown epi2 SNF 2010-02-12 23:45:45: HCL Flow Deviation Faults (Twice)

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Feb 16 08:31:56 PST 2010


Increased line pressure.
Ran the Si etch and the Mega etch and HCl pressure was stable.




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