Problem epi2 SNF 2010-02-09 15:31:04: wafer handling problem

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Feb 16 08:34:08 PST 2010


After running oxide wafers with thicker oxide that didn't have the pin marks and also talking with Ted K. , user believe the issue is with his oxide and not with the epi tool.




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