Problem epi2 SNF 2010-02-18 14:51:29: Dope has a light coating/ no Ge dep

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Feb 18 14:51:30 PST 2010


We will try doing some long etches tomorrow and reinspect dome.
Don't  use for Ge or SiGe deposition until we resolve the coating issue.




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