Shutdown epi2 SNF 2010-02-24 07:12:53: test for haze

maurice at maurice at
Fri Feb 26 14:33:43 PST 2010

The hazy on Ge is decreasing.  It is mainly on the edges of the wafers.  I have a couple of wafers still running in the system but I will yellow light it for the weekend.  If some one wants to use it they can take my wafers out and report on coral how they look.

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