Problem epi2 SNF 2010-02-26 14:38:18: hazy getting better

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Feb 26 14:38:18 PST 2010


The hazy on Ge is decreasing.  It is mainly on the edges of the wafers.  I have a couple of wafers still running in the system but I will yellow light it for the weekend.  If some one wants to use it they can take my wafers out and report on coral how they look.




More information about the epi2-pcs mailing list