From maurice at snf.stanford.edu Mon Jan 4 15:44:44 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:44:44 -0800 Subject: Comment epi2 SNF 2010-01-04 15:44:43: Silicon dep looks ok Message-ID: From gyama at snf.stanford.edu Fri Jan 8 14:07:19 2010 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 8 Jan 2010 14:07:19 -0800 Subject: Problem epi2 SNF 2010-01-08 14:07:18: wafer stuck in Ch A Message-ID: From jasonlin at snf.stanford.edu Fri Jan 8 14:08:38 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 8 Jan 2010 14:08:38 -0800 Subject: Problem epi2 SNF 2010-01-08 14:08:38: DOP1 Deviation from setpoint by 99% error Message-ID: Seems like no dopant gas is flowing. Valves in the back were open. Unable to manually remove wafer in chamber. From maurice at snf.stanford.edu Mon Jan 11 07:11:09 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Jan 2010 07:11:09 -0800 Subject: Problem epi2 SNF 2010-01-08 14:07:18: wafer stuck in Ch A Message-ID: wafer removed From maurice at snf.stanford.edu Mon Jan 11 07:11:24 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Jan 2010 07:11:24 -0800 Subject: Problem epi2 SNF 2010-01-08 14:08:38: DOP1 Deviation from setpoint by 99% error Message-ID: could not repeat problem From narii at snf.stanford.edu Mon Jan 11 22:40:59 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 11 Jan 2010 22:40:59 -0800 Subject: Problem epi2 SNF 2010-01-11 22:40:58: Unable to run Message-ID: When I tried to run in automatic mode, error 'Chamber not online' occured. When I tried in manual mode, I cannot move wafers from LL to transfer chamber because of 'Buf/LL different gases' error. From maurice at snf.stanford.edu Tue Jan 12 10:35:40 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 12 Jan 2010 10:35:40 -0800 Subject: Problem epi2 SNF 2010-01-11 22:40:58: Unable to run Message-ID: found wafers removed, system online and in inert idle From slcheng at snf.stanford.edu Thu Jan 14 17:18:46 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Thu, 14 Jan 2010 17:18:46 -0800 Subject: Problem epi2 SNF 2010-01-14 17:18:45: DOP1 flow deviation Message-ID: Running 100sccm on Dop1 (PH3) and the flow rate starts to drop after about 1min and directly to 0. However, when i ran D-Dop1, it works fine. Reported to Mary and she clarified that the gas bottle of Phopshine is not empty. Therefore, maybe a MFC problem for Dop1. From ryw at snf.stanford.edu Fri Jan 15 15:57:07 2010 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Fri, 15 Jan 2010 15:57:07 -0800 Subject: Problem epi2 SNF 2010-01-15 15:57:06: DOP1 and DOP2 not working Message-ID: From ryw at snf.stanford.edu Fri Jan 15 16:01:55 2010 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Fri, 15 Jan 2010 16:01:55 -0800 Subject: Comment epi2 SNF 2010-01-15 16:01:55: chamber A low water flow Message-ID: From cursive at snf.stanford.edu Sat Jan 16 16:46:58 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 16 Jan 2010 16:46:58 -0800 Subject: Problem epi2 SNF 2010-01-16 16:46:58: chamber A DCS flow deviated by 199% Message-ID: error message From cursive at snf.stanford.edu Sat Jan 16 18:51:56 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 16 Jan 2010 18:51:56 -0800 Subject: Problem epi2 SNF 2010-01-16 18:51:56: DCS MFC controller has problem Message-ID: MFC controller was out of range in process. 100sccm -> 1200sccm From jasonlin at snf.stanford.edu Sun Jan 17 11:56:25 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 17 Jan 2010 11:56:25 -0800 Subject: Problem epi2 SNF 2010-01-17 11:56:24: Ch A lift problem Message-ID: Error message: could not reach process condition. From fnf1pal at snf.stanford.edu Mon Jan 18 09:24:33 2010 From: fnf1pal at snf.stanford.edu (fnf1pal at snf.stanford.edu) Date: Mon, 18 Jan 2010 09:24:33 -0800 Subject: Problem epi2 SNF 2010-01-18 09:24:32: CH A heater contactor off Message-ID: From fnf1pal at snf.stanford.edu Mon Jan 18 09:24:58 2010 From: fnf1pal at snf.stanford.edu (fnf1pal at snf.stanford.edu) Date: Mon, 18 Jan 2010 09:24:58 -0800 Subject: Shutdown epi2 SNF 2010-01-18 09:24:58: low water flow and heater contactor off Message-ID: From maurice at snf.stanford.edu Tue Jan 19 10:11:03 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 10:11:03 -0800 Subject: Shutdown epi2 SNF 2010-01-19 10:11:03: dome seal pump issue Message-ID: From maurice at snf.stanford.edu Tue Jan 19 15:21:55 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 15:21:55 -0800 Subject: Shutdown epi2 SNF 2010-01-19 10:11:03: dome seal pump issue Message-ID: dome seal sensor adjusted From eenriquez at snf.stanford.edu Wed Jan 20 10:54:23 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jan 2010 10:54:23 -0800 Subject: Comment epi2 SNF 2010-01-20 10:54:23: Update Message-ID: Field service will be today by noon. From maurice at snf.stanford.edu Wed Jan 20 15:06:21 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jan 2010 15:06:21 -0800 Subject: Shutdown epi2 SNF 2010-01-18 09:24:58: low water flow and heater contactor off Message-ID: AMAT FS adjusted flow sensor From maurice at snf.stanford.edu Wed Jan 20 15:06:52 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jan 2010 15:06:52 -0800 Subject: Problem epi2 SNF 2010-01-18 09:24:32: CH A heater contactor off Message-ID: flow sensor adjusted From maurice at snf.stanford.edu Wed Jan 20 15:07:28 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jan 2010 15:07:28 -0800 Subject: Problem epi2 SNF 2010-01-17 11:56:24: Ch A lift problem Message-ID: Could not reproduce problem while AMAT FS was here From maurice at snf.stanford.edu Wed Jan 20 15:08:07 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jan 2010 15:08:07 -0800 Subject: Problem epi2 SNF 2010-01-16 18:51:56: DCS MFC controller has problem Message-ID: Could not reproduce problem while AMAT FS was here From maurice at snf.stanford.edu Wed Jan 20 15:09:04 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jan 2010 15:09:04 -0800 Subject: Problem epi2 SNF 2010-01-16 16:46:58: chamber A DCS flow deviated by 199% Message-ID: AMAT FS: air valve replaced and back pressure valve adjusted From maurice at snf.stanford.edu Wed Jan 20 15:09:22 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jan 2010 15:09:22 -0800 Subject: Comment epi2 SNF 2010-01-15 16:01:55: chamber A low water flow Message-ID: water sensor adjusted From maurice at snf.stanford.edu Wed Jan 20 15:09:35 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jan 2010 15:09:35 -0800 Subject: Problem epi2 SNF 2010-01-15 15:57:06: DOP1 and DOP2 not working Message-ID: AMAT FS: air valve replaced and back pressure valve adjusted From maurice at snf.stanford.edu Wed Jan 20 15:09:41 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jan 2010 15:09:41 -0800 Subject: Problem epi2 SNF 2010-01-14 17:18:45: DOP1 flow deviation Message-ID: AMAT FS: air valve replaced and back pressure valve adjusted From grahamab at snf.stanford.edu Thu Jan 21 13:15:28 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 21 Jan 2010 13:15:28 -0800 Subject: Problem epi2 SNF 2010-01-21 13:15:28: appears to be out of silane Message-ID: there seems to be no silane (SiH4). while trying to run autoseed layer, shows 60sccm as actual flow rate during stabliization step (flowing to vent). once the recipe switches to flow silane to the process chamber, it immediately reads "error" as the actual flow rate and shuts down if step is not skipped. also, silane pressure guage on epi1 reads zero. From eenriquez at snf.stanford.edu Thu Jan 21 13:45:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Jan 2010 13:45:42 -0800 Subject: Problem epi2 SNF 2010-01-21 13:15:28: appears to be out of silane Message-ID: Reset excess flow valve. From gyama at snf.stanford.edu Fri Jan 22 10:54:19 2010 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 22 Jan 2010 10:54:19 -0800 Subject: Comment epi2 SNF 2010-01-22 10:54:19: epi scale Message-ID: someone has been using it to weight out some chemical, looks like clear crystals. If you need to use, power supply is under monitor. After using, please put the power supply back under the monitor From alsune at snf.stanford.edu Sun Jan 24 00:44:21 2010 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 24 Jan 2010 00:44:21 -0800 Subject: Comment epi2 SNF 2010-01-24 00:44:21: Epi in isolation mode Message-ID: Because previous user ran a recipe that included dopant gas, tried to run GE-KOBA-DOPCLEAN before running the actual recipe. However, the system went into isolation mode while running the cleaning recipe. I didn't shut down the system for this situation can be corrected by a more experienced user. From alsune at snf.stanford.edu Sun Jan 24 00:46:52 2010 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 24 Jan 2010 00:46:52 -0800 Subject: Comment epi2 SNF 2010-01-24 00:46:52: Epi in isolation mode Message-ID: The epi went into isolation mode while running GE-KOBA-DOPCLEAN. Didn't shut down the machine for this situation can be corrected by a more experienced user. From alsune at snf.stanford.edu Sun Jan 24 00:47:15 2010 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 24 Jan 2010 00:47:15 -0800 Subject: Problem epi2 SNF 2010-01-24 00:47:14: Epi in isolation mode Message-ID: The epi went into isolation mode while running GE-KOBA-DOPCLEAN. Didn't shut down the machine for this situation can be corrected by a more experienced user. From maurice at snf.stanford.edu Mon Jan 25 08:02:38 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Jan 2010 08:02:38 -0800 Subject: Problem epi2 SNF 2010-01-24 00:47:14: Epi in isolation mode Message-ID: Both dopant gases turned off at the switch box. User tried to floow gas...reactor gave a flow diviation. From maurice at snf.stanford.edu Mon Jan 25 08:02:52 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Jan 2010 08:02:52 -0800 Subject: Comment epi2 SNF 2010-01-24 00:46:52: Epi in isolation mode Message-ID: Both dopant gases turned off at the switch box. User tried to floow gas...reactor gave a flow diviation. From maurice at snf.stanford.edu Mon Jan 25 08:03:01 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Jan 2010 08:03:01 -0800 Subject: Comment epi2 SNF 2010-01-24 00:44:21: Epi in isolation mode Message-ID: Both dopant gases turned off at the switch box. User tried to floow gas...reactor gave a flow diviation. From maurice at snf.stanford.edu Mon Jan 25 08:03:20 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Jan 2010 08:03:20 -0800 Subject: Comment epi2 SNF 2010-01-20 10:54:23: Update Message-ID: FS came in From eenriquez at snf.stanford.edu Mon Jan 25 08:08:05 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Jan 2010 08:08:05 -0800 Subject: Shutdown epi2 SNF 2010-01-25 08:08:05: HCl cylinder change Message-ID: HCl will not be available for at least 24 hours. Our leak detector is out for repair so the cylinder change which normally takes about 45 minutes, will now require a 24 hour pressure decay test. From mdickey at snf.stanford.edu Tue Jan 26 12:40:03 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 26 Jan 2010 12:40:03 -0800 Subject: Comment epi2 SNF 2010-01-26 12:40:03: HCL Message-ID: The CGA on the HCL bottle had to be tightened and repressurized. If it holds, should be ready between 9-10 tomorrow morning From eenriquez at snf.stanford.edu Wed Jan 27 17:13:38 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jan 2010 17:13:38 -0800 Subject: Comment epi2 SNF 2010-01-27 17:13:38: Update HCl Message-ID: HCl line has a leak at the last VCR fitting before it exits the gas cabinet. Need to plan for how we can replace this fitting. From eenriquez at snf.stanford.edu Fri Jan 29 15:36:14 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jan 2010 15:36:14 -0800 Subject: Comment epi2 SNF 2010-01-26 12:40:03: HCL Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jan 29 15:59:47 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jan 2010 15:59:47 -0800 Subject: Comment epi2 SNF 2010-01-29 15:59:47: Update HCl Message-ID: Need to replace a short piece of stainless steel line inside the gas cabinet. Gas line should be ready for leak testing by Tuesday.