Problem epi2 SNF 2010-01-08 14:08:38: DOP1 Deviation from setpoint by 99% error

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Fri Jan 8 14:08:38 PST 2010


Seems like no dopant gas is flowing.  Valves in the back were open.  Unable to manually remove wafer in chamber.




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