Problem epi2 SNF 2010-01-08 14:08:38: DOP1 Deviation from setpoint by 99% error

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Fri Jan 8 14:08:38 PST 2010

Previous message: Problem epi2 SNF 2010-01-08 14:07:18: wafer stuck in Ch A
Next message: Problem epi2 SNF 2010-01-08 14:08:38: DOP1 Deviation from setpoint by 99% error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Seems like no dopant gas is flowing.  Valves in the back were open.  Unable to manually remove wafer in chamber.

Previous message: Problem epi2 SNF 2010-01-08 14:07:18: wafer stuck in Ch A
Next message: Problem epi2 SNF 2010-01-08 14:08:38: DOP1 Deviation from setpoint by 99% error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list