Problem epi2 SNF 2010-01-11 22:40:58: Unable to run

narii at snf.stanford.edu narii at snf.stanford.edu
Mon Jan 11 22:40:59 PST 2010


When I tried to run in automatic mode, error 'Chamber not online' occured. When I tried in manual mode, I cannot move wafers from LL to transfer chamber because of 'Buf/LL different gases' error.




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