Problem epi2 SNF 2010-01-11 22:40:58: Unable to run
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Jan 12 10:35:40 PST 2010
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Problem epi2 SNF 2010-01-11 22:40:58: Unable to run
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Problem epi2 SNF 2010-01-14 17:18:45: DOP1 flow deviation
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found wafers removed, system online and in inert idle
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Problem epi2 SNF 2010-01-11 22:40:58: Unable to run
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Problem epi2 SNF 2010-01-14 17:18:45: DOP1 flow deviation
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