Problem epi2 SNF 2010-01-14 17:18:45: DOP1 flow deviation

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Thu Jan 14 17:18:46 PST 2010


Running 100sccm on Dop1 (PH3) and the flow rate starts to drop after about 1min and directly to 0. However, when i ran D-Dop1, it works fine. Reported to Mary and she clarified that the gas bottle of Phopshine is not empty. Therefore, maybe a MFC problem for Dop1. 
  




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