Problem epi2 SNF 2010-01-21 13:15:28: appears to be out of silane

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Thu Jan 21 13:15:28 PST 2010


there seems to be no silane (SiH4).  while trying to run autoseed layer, shows 60sccm as actual flow rate during stabliization step (flowing to vent).  once the recipe switches to flow silane to the process chamber, it immediately reads "error" as the actual flow rate and shuts down if step is not skipped.  also, silane pressure guage on epi1 reads zero.  




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