Comment epi2 SNF 2010-01-24 00:44:21: Epi in isolation mode

alsune at snf.stanford.edu alsune at snf.stanford.edu
Sun Jan 24 00:44:21 PST 2010


Because previous user ran a recipe that included dopant gas, tried to run GE-KOBA-DOPCLEAN before running the actual recipe. However, the system went into isolation mode while running the cleaning recipe. I didn't shut down the system for this situation can be corrected by a more experienced user.




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