January 2010 Archives by subject

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Starting: Mon Jan 4 15:44:44 PST 2010
Ending: Fri Jan 29 15:59:47 PST 2010
Messages: 41

Comment epi2 SNF 2010-01-04 15:44:43: Silicon dep looks ok maurice at snf.stanford.edu
Comment epi2 SNF 2010-01-15 16:01:55: chamber A low water flow ryw at snf.stanford.edu
Comment epi2 SNF 2010-01-15 16:01:55: chamber A low water flow maurice at snf.stanford.edu
Comment epi2 SNF 2010-01-20 10:54:23: Update eenriquez at snf.stanford.edu
Comment epi2 SNF 2010-01-20 10:54:23: Update maurice at snf.stanford.edu
Comment epi2 SNF 2010-01-22 10:54:19: epi scale gyama at snf.stanford.edu
Comment epi2 SNF 2010-01-24 00:44:21: Epi in isolation mode alsune at snf.stanford.edu
Comment epi2 SNF 2010-01-24 00:44:21: Epi in isolation mode maurice at snf.stanford.edu
Comment epi2 SNF 2010-01-24 00:46:52: Epi in isolation mode alsune at snf.stanford.edu
Comment epi2 SNF 2010-01-24 00:46:52: Epi in isolation mode maurice at snf.stanford.edu
Comment epi2 SNF 2010-01-26 12:40:03: HCL mdickey at snf.stanford.edu
Comment epi2 SNF 2010-01-26 12:40:03: HCL eenriquez at snf.stanford.edu
Comment epi2 SNF 2010-01-27 17:13:38: Update HCl eenriquez at snf.stanford.edu
Comment epi2 SNF 2010-01-29 15:59:47: Update HCl eenriquez at snf.stanford.edu
Problem epi2 SNF 2010-01-08 14:07:18: wafer stuck in Ch A gyama at snf.stanford.edu
Problem epi2 SNF 2010-01-08 14:07:18: wafer stuck in Ch A maurice at snf.stanford.edu
Problem epi2 SNF 2010-01-08 14:08:38: DOP1 Deviation from setpoint by 99% error jasonlin at snf.stanford.edu
Problem epi2 SNF 2010-01-08 14:08:38: DOP1 Deviation from setpoint by 99% error maurice at snf.stanford.edu
Problem epi2 SNF 2010-01-11 22:40:58: Unable to run narii at snf.stanford.edu
Problem epi2 SNF 2010-01-11 22:40:58: Unable to run maurice at snf.stanford.edu
Problem epi2 SNF 2010-01-14 17:18:45: DOP1 flow deviation slcheng at snf.stanford.edu
Problem epi2 SNF 2010-01-14 17:18:45: DOP1 flow deviation maurice at snf.stanford.edu
Problem epi2 SNF 2010-01-15 15:57:06: DOP1 and DOP2 not working ryw at snf.stanford.edu
Problem epi2 SNF 2010-01-15 15:57:06: DOP1 and DOP2 not working maurice at snf.stanford.edu
Problem epi2 SNF 2010-01-16 16:46:58: chamber A DCS flow deviated by 199% cursive at snf.stanford.edu
Problem epi2 SNF 2010-01-16 16:46:58: chamber A DCS flow deviated by 199% maurice at snf.stanford.edu
Problem epi2 SNF 2010-01-16 18:51:56: DCS MFC controller has problem cursive at snf.stanford.edu
Problem epi2 SNF 2010-01-16 18:51:56: DCS MFC controller has problem maurice at snf.stanford.edu
Problem epi2 SNF 2010-01-17 11:56:24: Ch A lift problem jasonlin at snf.stanford.edu
Problem epi2 SNF 2010-01-17 11:56:24: Ch A lift problem maurice at snf.stanford.edu
Problem epi2 SNF 2010-01-18 09:24:32: CH A heater contactor off fnf1pal at snf.stanford.edu
Problem epi2 SNF 2010-01-18 09:24:32: CH A heater contactor off maurice at snf.stanford.edu
Problem epi2 SNF 2010-01-21 13:15:28: appears to be out of silane grahamab at snf.stanford.edu
Problem epi2 SNF 2010-01-21 13:15:28: appears to be out of silane eenriquez at snf.stanford.edu
Problem epi2 SNF 2010-01-24 00:47:14: Epi in isolation mode alsune at snf.stanford.edu
Problem epi2 SNF 2010-01-24 00:47:14: Epi in isolation mode maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-01-18 09:24:58: low water flow and heater contactor off fnf1pal at snf.stanford.edu
Shutdown epi2 SNF 2010-01-18 09:24:58: low water flow and heater contactor off maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-01-19 10:11:03: dome seal pump issue maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-01-19 10:11:03: dome seal pump issue maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-01-25 08:08:05: HCl cylinder change eenriquez at snf.stanford.edu

Last message date: Fri Jan 29 15:59:47 PST 2010
Archived on: Sun Dec 23 08:52:54 PST 2012

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