From maurice at snf.stanford.edu Thu Jul 1 09:28:58 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jul 2010 09:28:58 -0700 Subject: Problem epi2 SNF 2010-06-30 18:44:03: Dop2 Deviation by 100% Message-ID: Training issue: Using a flow of 10 on a 200sccm MFC is not advisable From maurice at snf.stanford.edu Thu Jul 1 09:29:09 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jul 2010 09:29:09 -0700 Subject: Comment epi2 SNF 2010-06-30 06:40:28: AMAT testing Message-ID: logged From maurice at snf.stanford.edu Thu Jul 1 09:29:33 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jul 2010 09:29:33 -0700 Subject: Comment epi2 SNF 2010-06-10 10:12:13: HCL Message-ID: logged From maurice at snf.stanford.edu Thu Jul 1 09:29:44 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jul 2010 09:29:44 -0700 Subject: Comment epi2 SNF 2010-04-12 10:45:55: Cassettes scribed Message-ID: logged From ryw at snf.stanford.edu Sat Jul 3 11:48:45 2010 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Sat, 3 Jul 2010 11:48:45 -0700 Subject: Shutdown epi2 SNF 2010-07-03 11:48:44: wafer stuck in transfer chamber Message-ID: finished receipe and cannot move from transfer to LLA, stay for too long and wafer sensor cannot find it. Same problem as last time. From eenriquez at snf.stanford.edu Tue Jul 6 10:04:41 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Jul 2010 10:04:41 -0700 Subject: Comment epi2 SNF 2010-07-06 10:04:40: update Message-ID: Wafer surface was very rough. Increased the wafer sensor sensitivity and unloaded the wafer. Placed wafer in the user's wafer container. Maurice will run some test wafers. From ryw at snf.stanford.edu Tue Jul 6 15:34:17 2010 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Tue, 6 Jul 2010 15:34:17 -0700 Subject: Problem epi2 SNF 2010-07-06 15:34:16: MFC not controlling for the mixed dopant Message-ID: I ran mix dopant, including dop1 and dop2, no matter what value I set, it showed 391-395 sccm. From maurice at snf.stanford.edu Tue Jul 6 16:36:30 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Jul 2010 16:36:30 -0700 Subject: Shutdown epi2 SNF 2010-07-03 11:48:44: wafer stuck in transfer chamber Message-ID: Ran wafers after Elmer recovered stuck wafer...no problem. Previous user believes his process wafer had a problem that caused it to be rough and get stuck From narii at snf.stanford.edu Wed Jul 7 23:30:21 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Wed, 7 Jul 2010 23:30:21 -0700 Subject: Problem epi2 SNF 2010-07-07 23:30:20: DOP1 deviation error Message-ID: DOP1 deviation error even if I set it to the setting that has been worked. Maybe it is because the same reason as ryw's report. From maurice at snf.stanford.edu Fri Jul 9 09:19:49 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Jul 2010 09:19:49 -0700 Subject: Comment epi2 SNF 2010-07-09 09:19:49: mixed dopant update Message-ID: The mixed dopant MFC (the inject MFC) is not controlling. Dop1 and Dop2 share the same Inject MFC so we can't control P or N type mixed gases right now. Elmer is ordering a new MFC and we will let you know the delivery date when know it. The direct dopants are still working normally. From jasonlin at snf.stanford.edu Sun Jul 11 19:01:19 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 11 Jul 2010 19:01:19 -0700 Subject: Problem epi2 SNF 2010-07-11 19:01:19: ChA Overpressure Message-ID: system in Isolated state From maurice at snf.stanford.edu Mon Jul 12 11:45:12 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Jul 2010 11:45:12 -0700 Subject: Problem epi2 SNF 2010-07-11 19:01:19: ChA Overpressure Message-ID: PCV homed. System brough back online From maurice at snf.stanford.edu Mon Jul 12 11:45:49 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Jul 2010 11:45:49 -0700 Subject: Comment epi2 SNF 2010-07-06 10:04:40: update Message-ID: user recipe issue logged From maurice at snf.stanford.edu Mon Jul 12 11:46:16 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Jul 2010 11:46:16 -0700 Subject: Problem epi2 SNF 2010-06-28 21:49:33: door not responding automatically Message-ID: issue resolved itself From maurice at snf.stanford.edu Mon Jul 12 11:47:41 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Jul 2010 11:47:41 -0700 Subject: Problem epi2 SNF 2010-06-20 08:10:54: ch a heater contactor off Message-ID: No heater contacter issues reported in 3 weeks From maurice at snf.stanford.edu Mon Jul 12 11:48:54 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Jul 2010 11:48:54 -0700 Subject: Problem epi2 SNF 2010-07-07 23:30:20: DOP1 deviation error Message-ID: second report of the same problem...only one needed From maurice at snf.stanford.edu Mon Jul 12 11:50:10 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Jul 2010 11:50:10 -0700 Subject: Comment epi2 SNF 2009-09-14 14:24:31: Use LLA Message-ID: logged From slcheng at snf.stanford.edu Thu Jul 15 12:08:28 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Thu, 15 Jul 2010 12:08:28 -0700 Subject: Problem epi2 SNF 2010-07-15 12:08:28: Chamber A over pressure Message-ID: process failed due to pressure deviation. From eenriquez at snf.stanford.edu Thu Jul 15 14:03:05 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Jul 2010 14:03:05 -0700 Subject: Comment epi2 SNF 2010-07-15 14:03:05: Update dopant MFC Message-ID: The new dopant MFC should be here tomorrow afternoon. We will plan to install it on Monday. From eenriquez at snf.stanford.edu Thu Jul 15 15:33:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Jul 2010 15:33:30 -0700 Subject: Shutdown epi2 SNF 2010-07-15 15:33:29: Throttle valve problem Message-ID: Broken throttle valve drive bearing. Need to locate a replacement. From eenriquez at snf.stanford.edu Fri Jul 16 09:55:13 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Jul 2010 09:55:13 -0700 Subject: Shutdown epi2 SNF 2010-07-15 15:33:29: Throttle valve problem Message-ID: Replaced throttle valve drive bearing. Ran GE etch coat twice with no problems. From horvath at snf.stanford.edu Mon Jul 19 12:07:25 2010 From: horvath at snf.stanford.edu (horvath at snf.stanford.edu) Date: Mon, 19 Jul 2010 12:07:25 -0700 Subject: Problem epi2 SNF 2010-07-19 12:07:24: Ch A bulb failed Message-ID: Ch A bulb failed in lower zone. No process runs. From eenriquez at snf.stanford.edu Mon Jul 19 15:19:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Jul 2010 15:19:53 -0700 Subject: Shutdown epi2 SNF 2010-07-19 15:19:53: Replacing heater lamps. Message-ID: Found 4 burnt lower heater lamps. In the process of replacing them. Should be completed by 3 pm tomorrow (will also replace the mixed dopant MFC). From slcheng at snf.stanford.edu Mon Jul 19 18:08:57 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Mon, 19 Jul 2010 18:08:57 -0700 Subject: Problem epi2 SNF 2010-07-19 18:08:56: Pressure Deviation Message-ID: Pressure flucation when operating near 100 torr. From my experience, it happens sometimes in Active Idle (76 Torr) and my anneaing step (50 Torr) during the deposition process. When going down to 30 Torr and below, it is ok. From eenriquez at snf.stanford.edu Tue Jul 20 15:00:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Jul 2010 15:00:51 -0700 Subject: Comment epi2 SNF 2010-07-20 15:00:50: Update heater lamp Message-ID: Completed lamp change. Now replacing the mixed dopant MFC. Waiting for an MFC plug adapter. It shoulb be in tomorrow. From eenriquez at snf.stanford.edu Wed Jul 21 18:36:08 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 18:36:08 -0700 Subject: Comment epi2 SNF 2010-07-21 18:36:07: Update Message-ID: Installed a new mixed dopant MFC. Will turn the gases on tomorrow. Had a problem with the susceptor lifter. Found two of the air line connectors were loose. From eenriquez at snf.stanford.edu Thu Jul 22 14:30:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 14:30:09 -0700 Subject: Shutdown epi2 SNF 2010-07-19 15:19:53: Replacing heater lamps. Message-ID: Replaced 4 lower heater lamps. Also replaced the mixed dopant MFC (mfc# 3). Maurice now testing the system. From eenriquez at snf.stanford.edu Thu Jul 22 14:31:12 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 14:31:12 -0700 Subject: Problem epi2 SNF 2010-07-19 18:08:56: Pressure Deviation Message-ID: Cleaned the throttle valve. Replaced a defective roller bearing. From eenriquez at snf.stanford.edu Thu Jul 22 14:31:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 14:31:21 -0700 Subject: Comment epi2 SNF 2010-07-20 15:00:50: Update heater lamp Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 22 14:31:28 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 14:31:28 -0700 Subject: Comment epi2 SNF 2010-07-21 18:36:07: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 22 14:31:48 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 14:31:48 -0700 Subject: Problem epi2 SNF 2010-07-19 12:07:24: Ch A bulb failed Message-ID: Replaced 4 lower heater bulbs. From eenriquez at snf.stanford.edu Thu Jul 22 14:32:06 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 14:32:06 -0700 Subject: Comment epi2 SNF 2010-07-15 14:03:05: Update dopant MFC Message-ID: Installed new MFC From eenriquez at snf.stanford.edu Thu Jul 22 14:32:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 14:32:24 -0700 Subject: Comment epi2 SNF 2010-07-09 09:19:49: mixed dopant update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 22 14:32:46 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 14:32:46 -0700 Subject: Problem epi2 SNF 2010-07-06 15:34:16: MFC not controlling for the mixed dopant Message-ID: Replaced the MFC From maurice at snf.stanford.edu Thu Jul 22 16:59:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 22 Jul 2010 16:59:37 -0700 Subject: Problem epi2 SNF 2010-07-22 16:59:37: Dopant flow off 47sccm Message-ID: The new MFC with the MFC adaptor plug combination we have in the system for Dop1 and Dop2 shows a flow that is 47sccm off from zero.. - This means if you want a flow of 100sccm you must put in a value of 147sccm. - Our old MFC has been sent out for calibration and we expect it back in two weeks. When it returns from calibration it will be put back into the system. From narii at snf.stanford.edu Fri Jul 23 03:56:35 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Fri, 23 Jul 2010 03:56:35 -0700 Subject: Problem epi2 SNF 2010-07-23 03:56:35: Chamber A main scrubber fault Message-ID: While running my recipe, Chamber A main scrubber fault occured. Reset won't work, and my wafer is stuck inside the chamber. From narii at snf.stanford.edu Fri Jul 23 03:59:36 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Fri, 23 Jul 2010 03:59:36 -0700 Subject: Problem epi2 SNF 2010-07-23 03:59:36: LLA cannot be closed Message-ID: It says LLA is either busy or not ready to be closed From eenriquez at snf.stanford.edu Fri Jul 23 07:43:48 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Jul 2010 07:43:48 -0700 Subject: Problem epi2 SNF 2010-07-23 03:56:35: Chamber A main scrubber fault Message-ID: Restarted the main scrubber and cleaned-out the combustion chamber. From slcheng at snf.stanford.edu Sat Jul 24 15:52:44 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sat, 24 Jul 2010 15:52:44 -0700 Subject: Problem epi2 SNF 2010-07-24 15:52:43: Controller screen stock Message-ID: Suddenly jumped to a mode that can't not be operated by light pen. Don't know how to make it back to normal status. From mdickey at snf.stanford.edu Mon Jul 26 06:16:22 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:16:22 -0700 Subject: Shutdown epi2 SNF 2010-07-26 06:16:21: scrubber Message-ID: problem with the scrubber From eenriquez at snf.stanford.edu Mon Jul 26 11:30:52 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Jul 2010 11:30:52 -0700 Subject: Comment epi2 SNF 2010-07-26 11:30:51: Update scrubber Message-ID: Scrubber exhaust output seems to be clogged up. Need to clean up the scrubber and unclog the exhaust. Also need to replace all the corroded exhaust lines. System should be ready by Friday. From eenriquez at snf.stanford.edu Fri Jul 30 14:39:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Jul 2010 14:39:19 -0700 Subject: Shutdown epi2 SNF 2010-07-26 06:16:21: scrubber Message-ID: The scrubber has been repaired. Replaced 3 sections of the exhaust line. Ran Ge etch coat with no problems. From eenriquez at snf.stanford.edu Fri Jul 30 14:39:57 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Jul 2010 14:39:57 -0700 Subject: Comment epi2 SNF 2010-07-26 11:30:51: Update scrubber Message-ID: Replaced 3 sections of the exhaust line. From eenriquez at snf.stanford.edu Fri Jul 30 14:40:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Jul 2010 14:40:09 -0700 Subject: Problem epi2 SNF 2010-07-24 15:52:43: Controller screen stock Message-ID: Rebooted the system.