Shutdown epi2 SNF 2010-07-03 11:48:44: wafer stuck in transfer chamber

ryw at snf.stanford.edu ryw at snf.stanford.edu
Sat Jul 3 11:48:45 PDT 2010

Previous message: Comment epi2 SNF 2010-04-12 10:45:55: Cassettes scribed
Next message: Shutdown epi2 SNF 2010-07-03 11:48:44: wafer stuck in transfer chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

finished receipe and cannot move from transfer to LLA, stay for too long and wafer sensor cannot find it. Same problem as last time.

Previous message: Comment epi2 SNF 2010-04-12 10:45:55: Cassettes scribed
Next message: Shutdown epi2 SNF 2010-07-03 11:48:44: wafer stuck in transfer chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list