Problem epi2 SNF 2010-07-06 15:34:16: MFC not controlling for the mixed dopant

ryw at snf.stanford.edu ryw at snf.stanford.edu
Tue Jul 6 15:34:17 PDT 2010


I ran mix dopant, including  dop1 and dop2, no matter what value I set, it showed 391-395 sccm.




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