Shutdown epi2 SNF 2010-07-03 11:48:44: wafer stuck in transfer chamber

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Jul 6 16:36:30 PDT 2010


Ran wafers after Elmer recovered stuck wafer...no problem.  Previous user believes his process wafer had a problem that caused it to be rough and get stuck




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