Comment epi2 SNF 2010-07-09 09:19:49: mixed dopant update

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Jul 9 09:19:49 PDT 2010


The mixed dopant MFC (the inject MFC) is not controlling.  Dop1 and Dop2 share the same Inject MFC so we can't control P or N type mixed gases right now.  Elmer is ordering a new MFC and we will let you know the delivery date when know it.
The direct dopants are still working normally.




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