Problem epi2 SNF 2010-07-19 18:08:56: Pressure Deviation

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Mon Jul 19 18:08:57 PDT 2010


Pressure flucation when operating near 100 torr. From my experience, it happens sometimes in Active Idle (76 Torr) and my anneaing step (50 Torr) during the deposition process. When going down to 30 Torr and below, it is ok.  




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