Problem epi2 SNF 2010-07-22 16:59:37: Dopant flow off 47sccm

maurice at maurice at
Thu Jul 22 16:59:37 PDT 2010

The new MFC with the MFC adaptor plug combination we have in the system for Dop1 and Dop2 shows a flow that is 47sccm off from zero..
This means if you want a flow of 100sccm you must put  in a value of 147sccm.
Our old MFC has been sent out for calibration and we expect it back in two weeks.  When it returns from calibration it will be put back into the system.

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