Problem epi2 SNF 2010-07-22 16:59:37: Dopant flow off 47sccm

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Jul 22 16:59:37 PDT 2010


The new MFC with the MFC adaptor plug combination we have in the system for Dop1 and Dop2 shows a flow that is 47sccm off from zero..
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This means if you want a flow of 100sccm you must put  in a value of 147sccm.
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Our old MFC has been sent out for calibration and we expect it back in two weeks.  When it returns from calibration it will be put back into the system.




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