Problem epi2 SNF 2010-07-23 03:56:35: Chamber A main scrubber fault

narii at snf.stanford.edu narii at snf.stanford.edu
Fri Jul 23 03:56:35 PDT 2010


While running my recipe, Chamber A main scrubber fault occured. Reset won't work, and my wafer is stuck inside the chamber.




More information about the epi2-pcs mailing list