Shutdown epi2 SNF 2010-07-26 06:16:21: scrubber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 30 14:39:19 PDT 2010


The scrubber has been repaired.  Replaced 3 sections of the exhaust line.  Ran Ge etch coat with no problems.




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