From maurice at snf.stanford.edu Tue Jun 1 17:10:32 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 1 Jun 2010 17:10:32 -0700 Subject: Comment epi2 SNF 2010-06-01 17:10:32: update Message-ID: Sean came in over holiday weekend and calibrated chamber A wafer loading. - We ran several etches in the morning and had no water issues. After lunch, system cut off 6 times for low water. The last two times were after Elmer bypassed the filter in the process cooling line. We still need to solve this one. Also, after system abouts itself we had to home and calibrate the pressure control valve. The pressure swings wildly if it is not homed. - We did a 20kw test to check lamps and we are seeing the top temp flucuate about 10 degrees. It looks like the wafer is not centered in the pocket. We will center wafer tomorrow. From maurice at snf.stanford.edu Wed Jun 2 17:06:17 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Jun 2010 17:06:17 -0700 Subject: Comment epi2 SNF 2010-06-02 17:06:13: update Message-ID: Wafer drop onto susceptor centered. - Still have water issue. From maurice at snf.stanford.edu Thu Jun 3 16:24:11 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Jun 2010 16:24:11 -0700 Subject: Comment epi2 SNF 2010-06-03 16:24:10: update Message-ID: Elmer and Mike rebuilt flow meter. They found a magnet dragging on the plastic housing. - After the rebuild, we ran all day without a water fault. - We will continue to monitor the water flow. From maurice at snf.stanford.edu Thu Jun 3 16:26:38 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Jun 2010 16:26:38 -0700 Subject: Shutdown epi2 SNF 2010-05-10 14:28:24: pressure control and contactor issues Message-ID: Rebuilt water flow meter. - Pressure control valve needs to be rehomed and calibrated after system aborts. From maurice at snf.stanford.edu Thu Jun 3 16:28:50 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Jun 2010 16:28:50 -0700 Subject: Problem epi2 SNF 2010-05-08 15:39:54: Heater Contactor Off & Low Water Flow error Message-ID: Power supply and fuses replaced heater circuit - water flow meter rebuilt. From maurice at snf.stanford.edu Thu Jun 3 16:29:27 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Jun 2010 16:29:27 -0700 Subject: Problem epi2 SNF 2010-04-15 14:30:51: dichlorosilane now on, needs testing Message-ID: Silicon test run. No haze. Dep rate normal. From maurice at snf.stanford.edu Thu Jun 3 16:29:51 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Jun 2010 16:29:51 -0700 Subject: Problem epi2 SNF 2010-05-08 12:49:52: Heat contact off error Message-ID: Power supply and fuses replaced heater circuit From eenriquez at snf.stanford.edu Mon Jun 7 08:20:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Jun 2010 08:20:02 -0700 Subject: Shutdown epi2 SNF 2010-06-07 08:20:02: Process cooling water work Message-ID: From maurice at snf.stanford.edu Mon Jun 7 15:46:05 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Jun 2010 15:46:05 -0700 Subject: Shutdown epi2 SNF 2010-06-07 08:20:02: Process cooling water work Message-ID: PCW back up. System brought back on line. From eenriquez at snf.stanford.edu Tue Jun 8 12:44:58 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jun 2010 12:44:58 -0700 Subject: Comment epi2 SNF 2010-05-17 10:33:56: 5/17 AMAT FS here working on cooling water Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jun 8 12:45:06 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jun 2010 12:45:06 -0700 Subject: Comment epi2 SNF 2010-05-10 14:49:54: Update Message-ID: archived From maurice at snf.stanford.edu Tue Jun 8 12:56:08 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jun 2010 12:56:08 -0700 Subject: Comment epi2 SNF 2010-05-12 18:41:44: Update Message-ID: archive From maurice at snf.stanford.edu Tue Jun 8 12:56:22 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jun 2010 12:56:22 -0700 Subject: Comment epi2 SNF 2010-05-13 15:35:53: update Message-ID: archive From eenriquez at snf.stanford.edu Wed Jun 9 16:23:35 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 16:23:35 -0700 Subject: Comment epi2 SNF 2010-05-17 18:10:49: update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 9 16:23:44 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 16:23:44 -0700 Subject: Comment epi2 SNF 2010-05-14 14:58:16: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 9 16:23:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 16:23:49 -0700 Subject: Comment epi2 SNF 2010-05-18 14:42:08: update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 9 16:23:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 16:23:56 -0700 Subject: Comment epi2 SNF 2010-05-21 14:10:15: update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 9 16:24:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 16:24:02 -0700 Subject: Comment epi2 SNF 2010-05-24 15:55:03: update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 9 16:24:08 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 16:24:08 -0700 Subject: Comment epi2 SNF 2010-05-25 15:15:46: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 9 16:24:13 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 16:24:13 -0700 Subject: Comment epi2 SNF 2010-06-01 17:10:32: update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 9 16:24:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 16:24:19 -0700 Subject: Comment epi2 SNF 2010-06-02 17:06:13: update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 9 16:24:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 16:24:30 -0700 Subject: Comment epi2 SNF 2010-06-03 16:24:10: update Message-ID: Archived From gth at snf.stanford.edu Wed Jun 9 23:49:05 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Wed, 9 Jun 2010 23:49:05 -0700 Subject: Problem epi2 SNF 2010-06-09 23:49:05: vaccum wand bad. Message-ID: From gth at snf.stanford.edu Wed Jun 9 23:49:25 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Wed, 9 Jun 2010 23:49:25 -0700 Subject: Problem epi2 SNF 2010-06-09 23:49:24: light pen needs callibration. Message-ID: From mdickey at snf.stanford.edu Thu Jun 10 06:42:15 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 10 Jun 2010 06:42:15 -0700 Subject: Problem epi2 SNF 2010-06-09 23:49:05: vaccum wand bad. Message-ID: Found no problems with the wand.......what you talkin' about Willis? From mdickey at snf.stanford.edu Thu Jun 10 10:12:14 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 10 Jun 2010 10:12:14 -0700 Subject: Comment epi2 SNF 2010-06-10 10:12:13: HCL Message-ID: HCL bottle changed From ginel at snf.stanford.edu Wed Jun 16 00:22:15 2010 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Wed, 16 Jun 2010 00:22:15 -0700 Subject: Shutdown epi2 SNF 2010-06-16 00:22:14: machine stopped working Message-ID: While unloading my wafers, the screens went black and the tool stopped working. Don't know what happened. Prior processing was fine. My wafers are in the load lock. From maurice at snf.stanford.edu Wed Jun 16 16:38:39 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Jun 2010 16:38:39 -0700 Subject: Shutdown epi2 SNF 2010-06-16 00:22:14: machine stopped working Message-ID: System restarted...wafers unloaded...etched chamber...seems ok... From junil at snf.stanford.edu Wed Jun 16 21:30:51 2010 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Wed, 16 Jun 2010 21:30:51 -0700 Subject: Problem epi2 SNF 2010-06-16 21:30:51: wafer still in the process chamer Message-ID: process aborted due to gas flow range of my recipe. Wafer is still in the process chamber since I don't know how to handle this situation. From eenriquez at snf.stanford.edu Thu Jun 17 08:30:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Jun 2010 08:30:16 -0700 Subject: Problem epi2 SNF 2010-06-16 21:30:51: wafer still in the process chamer Message-ID: Homed the throttle valve and placed the chamber online. Placed the user's wafer in LLA. From horvath at snf.stanford.edu Thu Jun 17 12:17:52 2010 From: horvath at snf.stanford.edu (horvath at snf.stanford.edu) Date: Thu, 17 Jun 2010 12:17:52 -0700 Subject: Problem epi2 SNF 2010-06-17 12:17:51: CH A is in red state Message-ID: Error message: CH A detected system cabinet door being opened. Recipe aborted, CH A went to inert idle with a wafer in chamber. From eenriquez at snf.stanford.edu Thu Jun 17 13:20:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Jun 2010 13:20:02 -0700 Subject: Problem epi2 SNF 2010-06-17 12:17:51: CH A is in red state Message-ID: System door was opened. Closed and locked doors. Placed user's wafer in load lock A. From jasonlin at snf.stanford.edu Thu Jun 17 22:10:00 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Thu, 17 Jun 2010 22:10:00 -0700 Subject: Problem epi2 SNF 2010-06-17 22:09:59: Wafer stuck on transfer arm? Message-ID: Previous user's run didn't complete. It gave a "no wafer on blade" error. We were able to remove the remaining wafers from LLA, but there is still one wafer somewhere in the system. It shows up as a wafer on the transfer arm but we weren't able to manually move it to ChF, LLA, or LLB. From eenriquez at snf.stanford.edu Fri Jun 18 13:40:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Jun 2010 13:40:04 -0700 Subject: Problem epi2 SNF 2010-06-17 22:09:59: Wafer stuck on transfer arm? Message-ID: Wafer broke inside the chamber. Removed wafer. Also wiped down the chamber door o-ring and ran a Big Etch. Need to condition the chamber. From maurice at snf.stanford.edu Fri Jun 18 14:02:24 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Jun 2010 14:02:24 -0700 Subject: Problem epi2 SNF 2010-06-18 14:02:24: Conditioning chamber/ haze tests Message-ID: Elmer removed broke Wafer from inside the chamber, wiped down the chamber door o-ring and ran a Big Etch. Need to condition the chamber. From junil at snf.stanford.edu Sun Jun 20 08:10:55 2010 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Sun, 20 Jun 2010 08:10:55 -0700 Subject: Problem epi2 SNF 2010-06-20 08:10:54: ch a heater contactor off Message-ID: while running previous user's wafers, there had been a CH A HEATER CONTACTOR OFF. From maurice at snf.stanford.edu Mon Jun 21 11:41:30 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 Jun 2010 11:41:30 -0700 Subject: Problem epi2 SNF 2010-06-18 14:02:24: Conditioning chamber/ haze tests Message-ID: Woo Shik reports that his Ge deposition were haze free From maurice at snf.stanford.edu Mon Jun 21 15:54:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 Jun 2010 15:54:47 -0700 Subject: Comment epi2 SNF 2010-06-21 15:54:47: homed PCV Message-ID: From narii at snf.stanford.edu Mon Jun 21 20:20:35 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 21 Jun 2010 20:20:35 -0700 Subject: Problem epi2 SNF 2010-06-21 20:20:35: Chamber isolated, wafer handler has problem Message-ID: I tried abort sequence while 1 more wafer is remaining because reservation expired. The chamber suddenly goes to isolated state, and wafer handler says it is unsafe to unload the wafer. Wafers are inside of transfer chamber as well as chamber F. From narii at snf.stanford.edu Mon Jun 21 20:30:55 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 21 Jun 2010 20:30:55 -0700 Subject: Problem epi2 SNF 2010-06-21 20:30:55: LLA cannot be closed Message-ID: It keeps saying LLA is either busy or not ready to load wafer. Cannot close LLA From eenriquez at snf.stanford.edu Tue Jun 22 11:18:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jun 2010 11:18:02 -0700 Subject: Problem epi2 SNF 2010-06-21 20:20:35: Chamber isolated, wafer handler has problem Message-ID: Placed chamber online. From eenriquez at snf.stanford.edu Tue Jun 22 11:19:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jun 2010 11:19:04 -0700 Subject: Problem epi2 SNF 2010-06-21 20:30:55: LLA cannot be closed Message-ID: Closed LLA door from the Handlier Screen From jasonlin at snf.stanford.edu Tue Jun 22 23:36:38 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 22 Jun 2010 23:36:38 -0700 Subject: Problem epi2 SNF 2010-06-22 23:36:37: ChA overpressure & heater contactor off Message-ID: Gave this error during Ge Etch Coat, after 4 out of 5 wafers had run successfully. I removed my wafers, resetted the chamber, left it in Inert Idle. From eenriquez at snf.stanford.edu Thu Jun 24 15:01:03 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jun 2010 15:01:03 -0700 Subject: Problem epi2 SNF 2010-06-22 23:36:37: ChA overpressure & heater contactor off Message-ID: Modified recipe. From jasonlin at snf.stanford.edu Fri Jun 25 20:49:05 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 25 Jun 2010 20:49:05 -0700 Subject: Problem epi2 SNF 2010-06-25 20:49:05: ChA Overpressure Fault Message-ID: During my 3rd wafer, ChA overpressure fault, system went to isolated. I tried to reset the chamber but when it is trying to pumpdown, the pressure decreases very slowly. Because of this, after a bit, the system faults again, saying the pressure is too high (about 800 Torr), and goes back into isolated. Unable to return chamber into inert idle working state. Is there something wrong with the pumps? This ChA Overpressure fault happened to me last time I ran the system as well, except that time the fault happened during Ge Etch Coat (after 4 wafers had run successfully). From maurice at snf.stanford.edu Mon Jun 28 10:24:20 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 28 Jun 2010 10:24:20 -0700 Subject: Problem epi2 SNF 2010-06-25 20:49:05: ChA Overpressure Fault Message-ID: I have recovered user wafer and put it in loadlock B. I did a global reset on the system and then brought tool back online. I also homed and cal'ed the PCV. I am going to run the Ge etch about 10 times to see if I can repeat his reported problem From grahamab at snf.stanford.edu Mon Jun 28 21:49:34 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 28 Jun 2010 21:49:34 -0700 Subject: Problem epi2 SNF 2010-06-28 21:49:33: door not responding automatically Message-ID: would open, but then wouldn't respond to any commands. had to use the monitor handler menu, close the door, backfill in, and create a wafer. not sure what's going on. From tberg at snf.stanford.edu Wed Jun 30 06:40:28 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 30 Jun 2010 06:40:28 -0700 Subject: Comment epi2 SNF 2010-06-30 06:40:28: AMAT testing Message-ID: From jasonlin at snf.stanford.edu Wed Jun 30 18:44:03 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 30 Jun 2010 18:44:03 -0700 Subject: Problem epi2 SNF 2010-06-30 18:44:03: Dop2 Deviation by 100% Message-ID: Got this error in the step where I first start flowing dopant gas. I was flowing B1% at 10, mixing ratio was 10% in recipe header. The valve for B1% was open in the back.