Problem epi2 SNF 2010-05-08 12:49:52: Heat contact off error
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Jun 3 16:29:51 PDT 2010
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Problem epi2 SNF 2010-04-15 14:30:51: dichlorosilane now on, needs testing
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Shutdown epi2 SNF 2010-06-07 08:20:02: Process cooling water work
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Power supply and fuses replaced heater circuit
Previous message:
Problem epi2 SNF 2010-04-15 14:30:51: dichlorosilane now on, needs testing
Next message:
Shutdown epi2 SNF 2010-06-07 08:20:02: Process cooling water work
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