Shutdown epi2 SNF 2010-06-16 00:22:14: machine stopped working

ginel at ginel at
Wed Jun 16 00:22:15 PDT 2010

While unloading my wafers, the screens went black and the tool stopped working.  Don't know what happened.  Prior processing was fine.  My wafers are in the load lock.

More information about the epi2-pcs mailing list