Shutdown epi2 SNF 2010-06-16 00:22:14: machine stopped working

ginel at snf.stanford.edu ginel at snf.stanford.edu
Wed Jun 16 00:22:15 PDT 2010


While unloading my wafers, the screens went black and the tool stopped working.  Don't know what happened.  Prior processing was fine.  My wafers are in the load lock.




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