Problem epi2 SNF 2010-06-16 21:30:51: wafer still in the process chamer

junil at snf.stanford.edu junil at snf.stanford.edu
Wed Jun 16 21:30:51 PDT 2010


process aborted due to gas flow range of my recipe.  Wafer is still in the process chamber since I don't know how to handle this situation. 




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