Problem epi2 SNF 2010-06-17 12:17:51: CH A is in red state

horvath at snf.stanford.edu horvath at snf.stanford.edu
Thu Jun 17 12:17:52 PDT 2010

Previous message: Problem epi2 SNF 2010-06-16 21:30:51: wafer still in the process chamer
Next message: Problem epi2 SNF 2010-06-17 12:17:51: CH A is in red state
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Error message: CH A detected system cabinet door being opened. 
Recipe aborted, CH A went to inert idle with a wafer in chamber.

Previous message: Problem epi2 SNF 2010-06-16 21:30:51: wafer still in the process chamer
Next message: Problem epi2 SNF 2010-06-17 12:17:51: CH A is in red state
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list