Problem epi2 SNF 2010-06-17 22:09:59: Wafer stuck on transfer arm?

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Thu Jun 17 22:10:00 PDT 2010


Previous user's run didn't complete.  It gave a "no wafer on blade" error.  We were able to remove the remaining wafers from LLA, but there is still one wafer somewhere in the system.  It shows up as a wafer on the transfer arm but we weren't able to manually move it to ChF, LLA, or LLB.




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