Problem epi2 SNF 2010-06-17 22:09:59: Wafer stuck on transfer arm?

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 18 13:40:04 PDT 2010


Wafer broke inside the chamber.  Removed wafer. Also wiped down the chamber door o-ring and ran a Big Etch.  Need to condition the chamber.




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