Problem epi2 SNF 2010-06-18 14:02:24: Conditioning chamber/ haze tests

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Jun 18 14:02:24 PDT 2010


Elmer removed broke Wafer  from inside the chamber, wiped down the chamber door o-ring and ran a Big Etch.  Need to condition the chamber.




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