Problem epi2 SNF 2010-06-18 14:02:24: Conditioning chamber/ haze tests
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Jun 18 14:02:24 PDT 2010
Elmer removed broke Wafer from inside the chamber, wiped down the chamber door o-ring and ran a Big Etch. Need to condition the chamber.
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