Comment epi2 SNF 2010-06-21 15:54:47: homed PCV
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Jun 21 15:54:47 PDT 2010
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Problem epi2 SNF 2010-06-20 08:10:54: ch a heater contactor off
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Problem epi2 SNF 2010-06-21 20:20:35: Chamber isolated, wafer handler has problem
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Problem epi2 SNF 2010-06-20 08:10:54: ch a heater contactor off
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Problem epi2 SNF 2010-06-21 20:20:35: Chamber isolated, wafer handler has problem
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