Problem epi2 SNF 2010-06-21 20:20:35: Chamber isolated, wafer handler has problem

narii at snf.stanford.edu narii at snf.stanford.edu
Mon Jun 21 20:20:35 PDT 2010


I tried abort sequence while 1 more wafer is remaining because reservation expired. The chamber suddenly goes to isolated state, and wafer handler says it is unsafe to unload the wafer. Wafers are inside of transfer chamber as well as chamber F.




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