Problem epi2 SNF 2010-06-22 23:36:37: ChA overpressure & heater contactor off

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Tue Jun 22 23:36:38 PDT 2010


Gave this error during Ge Etch Coat, after 4 out of 5 wafers had run successfully.  I removed my wafers, resetted the chamber, left it in Inert Idle.




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