Problem epi2 SNF 2010-06-25 20:49:05: ChA Overpressure Fault

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Jun 28 10:24:20 PDT 2010


I have recovered user wafer and put it in loadlock B.
I did a global reset on the system and then brought tool back online.
I also homed and cal'ed the PCV.
I am going to run the Ge etch about 10 times to see if I can repeat his reported problem




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