Problem epi2 SNF 2010-06-30 18:44:03: Dop2 Deviation by 100%

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Jun 30 18:44:03 PDT 2010


Got this error in the step where I first start flowing dopant gas.
I was flowing B1% at 10, mixing ratio was 10% in recipe header.
The valve for B1% was open in the back.




More information about the epi2-pcs mailing list