From slcheng at snf.stanford.edu Mon Mar 1 19:32:44 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Mon, 1 Mar 2010 19:32:44 -0800 Subject: Comment epi2 SNF 2010-03-01 19:32:43: haze updates Message-ID: Ran 5 wafers. all look similar as what Raja reported From maurice at snf.stanford.edu Tue Mar 2 08:48:45 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:48:45 -0800 Subject: Comment epi2 SNF 2010-03-02 08:48:44: dome inspected:clear Message-ID: From slcheng at snf.stanford.edu Fri Mar 5 22:24:52 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Fri, 5 Mar 2010 22:24:52 -0800 Subject: Problem epi2 SNF 2010-03-05 22:24:52: Transfer Robot TOP/EXT axis Message-ID: That's from the fail message. I think the stepper if off. Can't manually or automatically move the transfer arm right now. From eenriquez at snf.stanford.edu Mon Mar 8 08:59:41 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Mar 2010 08:59:41 -0800 Subject: Shutdown epi2 SNF 2010-03-08 08:59:41: Robot arm not moving Message-ID: Need to open the transfer chamber From eenriquez at snf.stanford.edu Mon Mar 8 14:36:44 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Mar 2010 14:36:44 -0800 Subject: Comment epi2 SNF 2010-03-08 14:36:44: Update robot arm Message-ID: Possibly a bad 5-axis arm driver. Field service will try to come here tomorrow with the part (still to check if they have the driver in stock). From eenriquez at snf.stanford.edu Wed Mar 10 19:34:45 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Mar 2010 19:34:45 -0800 Subject: Shutdown epi2 SNF 2010-03-08 08:59:41: Robot arm not moving Message-ID: Field service replaced the 5 axis controller and the robot arm home sensor. He also installed a front monitor base to replace the monitor bezel. He adjusted all the wafer hand-off positions. Now cyling 25 wafers. From eenriquez at snf.stanford.edu Wed Mar 10 19:34:50 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Mar 2010 19:34:50 -0800 Subject: Problem epi2 SNF 2010-03-05 22:24:52: Transfer Robot TOP/EXT axis Message-ID: Field service replaced the 5 axis controller and the robot arm home sensor. He also installed a front monitor base to replace the monitor bezel. He adjusted all the wafer hand-off positions. Now cyling 25 wafers. From eenriquez at snf.stanford.edu Wed Mar 10 19:34:59 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Mar 2010 19:34:59 -0800 Subject: Comment epi2 SNF 2010-03-08 14:36:44: Update robot arm Message-ID: Archived From eenriquez at snf.stanford.edu Wed Mar 10 19:36:08 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Mar 2010 19:36:08 -0800 Subject: Comment epi2 SNF 2010-03-10 19:36:08: Unload test wafers Message-ID: Please unload my test wafers and place them in the clear wafer box. From eenriquez at snf.stanford.edu Thu Mar 11 08:58:54 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Mar 2010 08:58:54 -0800 Subject: Comment epi2 SNF 2010-03-10 19:36:08: Unload test wafers Message-ID: Unloaded wafers From eenriquez at snf.stanford.edu Mon Mar 15 14:48:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Mar 2010 14:48:09 -0700 Subject: Shutdown epi2 SNF 2010-03-15 14:48:08: Wafer lift problem Message-ID: Wafer is too slow going to the process position. Need to adjust the speed. From eenriquez at snf.stanford.edu Tue Mar 16 13:22:13 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Mar 2010 13:22:13 -0700 Subject: Shutdown epi2 SNF 2010-03-15 14:48:08: Wafer lift problem Message-ID: Adjusted the lift speed (home to process). Ran Ge etchcoat. From jasonlin at snf.stanford.edu Wed Mar 17 00:45:31 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 17 Mar 2010 00:45:31 -0700 Subject: Problem epi2 SNF 2010-03-17 00:45:31: Ch A Pressure Deviation Fault Message-ID: Started as a wafer lift error, resetted chamber, seemed to be ok but then it gave pressure deviation fault and is in Isolated state. Keeping it yellow in case a more experienced user knows how to fix this. From ryw at snf.stanford.edu Wed Mar 17 12:39:53 2010 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Wed, 17 Mar 2010 12:39:53 -0700 Subject: Problem epi2 SNF 2010-03-17 12:39:52: wafer too far off the center in transfer chamber Message-ID: cannot move it to the growth chamber From eenriquez at snf.stanford.edu Wed Mar 17 14:41:05 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Mar 2010 14:41:05 -0700 Subject: Problem epi2 SNF 2010-03-17 00:45:31: Ch A Pressure Deviation Fault Message-ID: Chamber A door was stuck open. Reset the error. From eenriquez at snf.stanford.edu Wed Mar 17 14:43:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Mar 2010 14:43:04 -0700 Subject: Problem epi2 SNF 2010-03-17 12:39:52: wafer too far off the center in transfer chamber Message-ID: User used LL B's cassette in LLA. Will scribe the cassettes From jasonlin at snf.stanford.edu Fri Mar 19 12:19:33 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 19 Mar 2010 12:19:33 -0700 Subject: Problem epi2 SNF 2010-03-19 12:19:32: Ch A heater contactor off & low water flow Message-ID: When going from Cold idle to Hot idle, gave the above 2 faults. Now back in Inert idle. From jasonlin at snf.stanford.edu Mon Mar 22 22:31:37 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 22 Mar 2010 22:31:37 -0700 Subject: Problem epi2 SNF 2010-03-22 22:31:36: DOP2 Deviation by 57% Message-ID: Chamber then went into Isolated state. One wafer stuck inside, was in the middle of process. From jasonlin at snf.stanford.edu Mon Mar 22 22:47:14 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 22 Mar 2010 22:47:14 -0700 Subject: Problem epi2 SNF 2010-03-22 22:47:13: Cannot close LLA door Message-ID: From jasonlin at snf.stanford.edu Mon Mar 22 22:49:52 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 22 Mar 2010 22:49:52 -0700 Subject: Comment epi2 SNF 2010-03-22 22:49:51: LLA Door now closed Message-ID: More experienced labmember helped me close it. But the chamber is still in Isolated state. From eenriquez at snf.stanford.edu Tue Mar 23 10:26:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Mar 2010 10:26:30 -0700 Subject: Comment epi2 SNF 2010-03-23 10:26:30: Update low DOP2 flow Message-ID: Dop2 cylinder pressure was OK. Unloaded the user's wafer. Need to find out which recipe the user was running (was not in logbook). From bchui at snf.stanford.edu Wed Mar 24 00:43:04 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 24 Mar 2010 00:43:04 -0700 Subject: Problem epi2 SNF 2010-03-24 00:43:03: Wafer sense failed on LLB Message-ID: Error message said "AI error" From slcheng at snf.stanford.edu Wed Mar 24 12:44:20 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 24 Mar 2010 12:44:20 -0700 Subject: Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean. Message-ID: Wafer sense in CHB doesn't work. Needs to creaste wafers by yourself. THe cassette in LLA is probably too dirty that when i start to transfer wafers from LLA to ChA. THe wafer was stock in transfer chamber. Only this cassette does'nt work. The best way is to move the cassette from LLB to LLA and use LLA for process only. From jasonlin at snf.stanford.edu Thu Mar 25 00:46:46 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Thu, 25 Mar 2010 00:46:46 -0700 Subject: Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57% Message-ID: Same problem as 3/22/2010. Went into Isolated state. LLA could not be closed normally and had to be manually shut (same as last time). Was running the same recipe. In the header of that recipe (Jason-NP2), I set DOP2 to 2%. Is that too low and causing this problem? From kamins at stanford.edu Thu Mar 25 01:05:58 2010 From: kamins at stanford.edu (Ted Kamins) Date: Thu, 25 Mar 2010 01:05:58 -0700 (PDT) Subject: Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57% In-Reply-To: <20100325074646.9D5F218FC22@smtp.stanford.edu> Message-ID: <445053961.2060031269504358931.JavaMail.root@zm07.stanford.edu> Jason, For a single flowmeter, the manufacturers of the latest flowmeters CLAIM that 2% is OK. Even if that claim is valid, 50% of 2% is an even smaller number, and assuming that no momentary deviations occur is probably too hard. That's for a single flowmeter. If you are refering to the mixing ratio in the header of the recipe, that's more complicated. The mixing ratio appears to control two flowmeters (called source and diluent in other reactors), and proper operation also requires that the pressure at an internal node is correct. I'm concerned that operating at the limit of the MFC and then compounding that with the need for the proper pressure at that node (and probably some complex software) is too hard. Can you obtain the same dopant flow by using a higher mixing ratio and a lower dopant 2 inject flow? Ted ----- Original Message ----- From: jasonlin at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Sent: Thursday, March 25, 2010 12:46:46 AM GMT -08:00 US/Canada Pacific Subject: Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57% Same problem as 3/22/2010. Went into Isolated state. LLA could not be closed normally and had to be manually shut (same as last time). Was running the same recipe. In the header of that recipe (Jason-NP2), I set DOP2 to 2%. Is that too low and causing this problem? From maurice at stanford.edu Thu Mar 25 10:40:59 2010 From: maurice at stanford.edu (Maurice Stevens) Date: Thu, 25 Mar 2010 10:40:59 -0700 Subject: Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57% In-Reply-To: <445053961.2060031269504358931.JavaMail.root@zm07.stanford.edu> References: <445053961.2060031269504358931.JavaMail.root@zm07.stanford.edu> Message-ID: <4BABA02B.1020908@stanford.edu> Hi Jason, The Dopant line has an MFC of 500 sccm the hydrogen line has an MFC of 20 slm For your 2% mixture we are asking for 2% of the dopant 500sccm mass flow controller (MFC) and 98% of the H2 20slm MFC: 10 sccm Dopant2 19.6 slm H2 Generally, you don't want to operate an MFC in the upper 95% or the lower 5% of their range. I ran your flows and got the same results that you did...a deviation error..it gave a value of 4.6sccm. We are asking the 500sccm MFC to give you a value of 10sccm...that is a little tough. I didn't have a problem with 5% or even 3%. -m Ted Kamins wrote: > Jason, > > For a single flowmeter, the manufacturers of the latest flowmeters CLAIM that 2% is OK. Even if that claim is valid, 50% of 2% is an even smaller number, and assuming that no momentary deviations occur is probably too hard. That's for a single flowmeter. > > If you are refering to the mixing ratio in the header of the recipe, that's more complicated. The mixing ratio appears to control two flowmeters (called source and diluent in other reactors), and proper operation also requires that the pressure at an internal node is correct. I'm concerned that operating at the limit of the MFC and then compounding that with the need for the proper pressure at that node (and probably some complex software) is too hard. > > Can you obtain the same dopant flow by using a higher mixing ratio and a lower dopant 2 inject flow? > > Ted > > ----- Original Message ----- > From: jasonlin at snf.stanford.edu > To: epi2-pcs at snf.stanford.edu > Sent: Thursday, March 25, 2010 12:46:46 AM GMT -08:00 US/Canada Pacific > Subject: Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57% > > Same problem as 3/22/2010. Went into Isolated state. LLA could not be closed normally and had to be manually shut (same as last time). > Was running the same recipe. In the header of that recipe (Jason-NP2), I set DOP2 to 2%. Is that too low and causing this problem? > > From maurice at snf.stanford.edu Fri Mar 26 07:06:14 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:06:14 -0700 Subject: Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57% Message-ID: 2% for doping mixure is too low for MFC. User advised to modify his recipe. From maurice at snf.stanford.edu Fri Mar 26 07:06:48 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:06:48 -0700 Subject: Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean. Message-ID: could not repeat problem From maurice at snf.stanford.edu Fri Mar 26 07:07:12 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:07:12 -0700 Subject: Comment epi2 SNF 2010-03-23 10:26:30: Update low DOP2 flow Message-ID: recipe issue From maurice at snf.stanford.edu Fri Mar 26 07:07:49 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:07:49 -0700 Subject: Problem epi2 SNF 2010-03-22 22:47:13: Cannot close LLA door Message-ID: More experienced user closed door From maurice at snf.stanford.edu Fri Mar 26 07:08:08 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:08:08 -0700 Subject: Problem epi2 SNF 2010-03-22 22:31:36: DOP2 Deviation by 57% Message-ID: user recipe issue From maurice at snf.stanford.edu Fri Mar 26 07:08:48 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:08:48 -0700 Subject: Problem epi2 SNF 2010-02-26 14:38:18: hazy getting better Message-ID: Haze issue cleared up weeks ago From maurice at snf.stanford.edu Fri Mar 26 07:09:04 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:09:04 -0700 Subject: Comment epi2 SNF 2010-01-04 15:44:43: Silicon dep looks ok Message-ID: logged From maurice at snf.stanford.edu Fri Mar 26 07:09:15 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:09:15 -0700 Subject: Comment epi2 SNF 2010-02-27 11:08:52: Ge Haze Update Message-ID: logged From maurice at snf.stanford.edu Fri Mar 26 07:09:24 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:09:24 -0700 Subject: Comment epi2 SNF 2010-03-01 19:32:43: haze updates Message-ID: logged From maurice at snf.stanford.edu Fri Mar 26 07:09:35 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:09:35 -0700 Subject: Comment epi2 SNF 2010-03-02 08:48:44: dome inspected:clear Message-ID: logged From maurice at snf.stanford.edu Fri Mar 26 07:09:57 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:09:57 -0700 Subject: Comment epi2 SNF 2010-03-22 22:49:51: LLA Door now closed Message-ID: logged From cursive at snf.stanford.edu Fri Mar 26 09:55:56 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 26 Mar 2010 09:55:56 -0700 Subject: Problem epi2 SNF 2010-03-26 09:55:55: low wafer flow problem during etch coat Message-ID: process stop during etch coat process From cursive at snf.stanford.edu Sun Mar 28 11:07:13 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 28 Mar 2010 11:07:13 -0700 Subject: Problem epi2 SNF 2010-03-28 11:07:13: take long time to ramp to 1000'C Message-ID: take 110sec for lower temp to ramp to 1000'C, and the upper temp is over heat(~1200'C). Ouput power is about 14kw. From maurice at snf.stanford.edu Mon Mar 29 08:38:18 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Mar 2010 08:38:18 -0700 Subject: Shutdown epi2 SNF 2010-03-29 08:38:18: Lower pyro low temp Message-ID: Ran our 20KW tempurature test. Upper= 873c lower = 679c Both upper and lower pyrometers should be reading ~885 c From maurice at snf.stanford.edu Mon Mar 29 15:39:56 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Mar 2010 15:39:56 -0700 Subject: Shutdown epi2 SNF 2010-03-29 15:39:56: contact shutting off during etch Message-ID: From eenriquez at snf.stanford.edu Wed Mar 31 08:33:25 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Mar 2010 08:33:25 -0700 Subject: Comment epi2 SNF 2010-03-31 08:33:25: Update Message-ID: Low pyrometer temp is caused by deposition on bottom dome. The good new however is that the coating is localized to the small area that the pyrometer "looks" through. - We will try several long etches to try and clear-up the coating. If this is ineffective, we will open the chamber and try to clean it by hand. Contact shutting off. Observed the flow interlock momentarily trip while it is running a recipe. Trying to determine if its caused by an actual water flow fluctuation, electronics or temperature.