Problem epi2 SNF 2010-03-05 22:24:52: Transfer Robot TOP/EXT axis

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Mar 10 19:34:50 PST 2010


Field service replaced the 5 axis controller and the robot arm home sensor.  He also installed a front monitor base to replace the monitor bezel.
He adjusted all the wafer hand-off positions.  Now cyling 25 wafers.




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