Shutdown epi2 SNF 2010-03-15 14:48:08: Wafer lift problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 15 14:48:09 PDT 2010


Wafer is too slow going to the process position.  Need to adjust the speed.




More information about the epi2-pcs mailing list