Problem epi2 SNF 2010-03-17 00:45:31: Ch A Pressure Deviation Fault

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Mar 17 00:45:31 PDT 2010


Started as a wafer lift error, resetted chamber, seemed to be ok but then it gave pressure deviation fault and is in Isolated state.  Keeping it yellow in case a more experienced user knows how to fix this.




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