Problem epi2 SNF 2010-03-17 12:39:52: wafer too far off the center in transfer chamber
ryw at snf.stanford.edu
ryw at snf.stanford.edu
Wed Mar 17 12:39:53 PDT 2010
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Problem epi2 SNF 2010-03-17 00:45:31: Ch A Pressure Deviation Fault
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Problem epi2 SNF 2010-03-17 12:39:52: wafer too far off the center in transfer chamber
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cannot move it to the growth chamber
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Problem epi2 SNF 2010-03-17 00:45:31: Ch A Pressure Deviation Fault
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Problem epi2 SNF 2010-03-17 12:39:52: wafer too far off the center in transfer chamber
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